Publication Information

Title: Atomic layer deposition of epitaxial layers of anatase on strontium titanate single crystals: Morphological and photoelectrochemical characterization

Type: Journal

Info: J. Vac. Sci. Technol. A 33(1), Jan/Feb 2015

Date: 2014-11-11

DOI: http://dx.doi.org/10.1116/1.4902328

Author Information

Name

Institution

University of Wyoming

University of Wyoming

University of Wyoming

Films

Deposition Temperature = 250C

7550-45-0

7732-18-5

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Rigaku

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

Asylum Research

Thickness

Ellipsometry

Filmetrics

Thickness

XRR, X-Ray Reflectivity

Rigaku

Photocurrent

Photocurrent Measurements

Custom

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Kratos Analytical Axis Ultra DLD

Substrates

SrTiO3

Silicon

Keywords

High-k Dielectric Thin Films

Titanium Compounds

Notes

Ultratech Fiji epitaxial thermal ALD study of anatase TiO2 on SrTiO3.

159

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