TiO2 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing TiO2 films returned 105 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
13D-Branched ZnO/CdS Nanowire Arrays for Solar Water Splitting and the Service Safety Research
2A low-temperature-grown TiO2 -based device for the flexible stacked RRAM application
3A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
4Al2O3/TiO2 multilayer thin films grown by plasma enhanced atomic layer deposition for organic light-emitting diode passivation
5Al2O3/TiO2 nanolaminate gate dielectric films with enhanced electrical performances for organic field-effect transistors
6An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor
7Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
8Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
9Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
10Atomic layer deposition of epitaxial layers of anatase on strontium titanate single crystals: Morphological and photoelectrochemical characterization
11Atomic layer deposition of titanium dioxide using titanium tetrachloride and titanium tetraisopropoxide as precursors
12Atomic layer deposition TiO2-Al2O3 stack: An improved gate dielectric on Ga-polar GaN metal oxide semiconductor capacitors
13Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
14Band alignment of atomic layer deposited TiO2/multilayer MoS2 interface determined by x-ray photoelectron spectroscopy
15Biofilm prevention on cochlear implants
16Bipolar resistive switching in amorphous titanium oxide thin film
17Breakdown and Protection of ALD Moisture Barrier Thin Films
18Conformal Formation of (GeTe2)(1-x)(Sb2Te3)x Layers by Atomic Layer Deposition for Nanoscale Phase Change Memories
19Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
20Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
21Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition
22Effect of an Al2O3/TiO2 Passivation Layer on the Performance of Amorphous Zinc-Tin Oxide Thin-Film Transistors
23Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film
24Effects of TiO2 Interfacial Atomic Layers on Device Performances and Exciton Dynamics in ZnO Nanorod Polymer Solar Cells
25Efficiency Enhancement of Nanotextured Black Silicon Solar Cells Using Al2O3/TiO2 Dual-Layer Passivation Stack Prepared by Atomic Layer Deposition
26Electronic Instabilities Leading to Electroformation of Binary Metal Oxide-based Resistive Switches
27Employing Overlayers To Improve the Performance of Cu2BaSnS4 Thin Film based Photoelectrochemical Water Reduction Devices
28Energy-enhanced atomic layer deposition for more process and precursor versatility
29Enhanced photocatalytic performance in atomic layer deposition grown TiO2 thin films via hydrogen plasma treatment
30Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition
31Epitaxial 1D electron transport layers for high-performance perovskite solar cells
32Evaluation of Vapor Deposition Techniques for Membrane Pore Size Modification
33Fabrication of Highly Ordered and Well-Aligned PbTiO3/TiN Core-Shell Nanotube Arrays
34Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO2 layer
35Flexible Memristive Memory Array on Plastic Substrates
36Flexible Perovskite Photovoltaic Modules and Solar Cells Based on Atomic Layer Deposited Compact Layers and UV-Irradiated TiO2 Scaffolds on Plastic Substrates
37Fluorinated polymer-grafted organic dielectrics for organic field-effect transistors with low-voltage and electrical stability
38Gas permeation barriers deposited by atmospheric pressure plasma enhanced atomic layer deposition
39Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition
40Growth behavior and structural characteristics of TiO2 thin films using (CpN)Ti(NMe2)2 and oxygen remote plasma
41Half-wave phase retarder working in transmission around 630nm realized by atomic layer deposition of sub-wavelength gratings
42High rate roll to roll atomic layer deposition, and its application to moisture barriers on polymer films
43High-efficiency embedded transmission grating
44Highly efficient and bending durable perovskite solar cells: toward a wearable power source
45Highly reflective polymeric substrates functionalized utilizing atomic layer deposition
46Impedance spectroscopy analysis on the effects of TiO2 interfacial atomic layers in ZnO nanorod polymer solar cells: Effects of interfacial charge extraction on diffusion and recombination
47Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers
48In situ control of oxygen vacancies in TiO2 by atomic layer deposition for resistive switching devices
49In situ diagnostics for studying gas-surface reactions during thermal and plasma-assisted atomic layer deposition
50Influence of Atomic Layer Deposition Temperatures on TiO2/n-Si MOS Capacitor
51Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide
52Infrared Study on Room-temperature Atomic Layer Deposition of TiO2 Using Tetrakis(dimethylamino)titanium and Remote-Plasma Excited Water Vapor
53Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS
54Investigation of residual chlorine in TiO2 films grown by Atomic Layer Deposition
55Investigation of ultra-thin titania films as hole-blocking contacts for organic photovoltaics
56Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
57Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings
58Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
59Low temperature temporal and spatial atomic layer deposition of TiO2 films
60Low-Temperature ALD Growth of SrTiO3 Thin Films from Sr beta-Diketonates and Ti Alkoxide Precursors Using Oxygen Remote Plasma as an Oxidation Source
61Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
62Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
63Mesoporous perovskite solar cells and the role of nanoscale compact layers for remarkable all-round high efficiency under both indoor and outdoor illumination
64Microscopic origin of bipolar resistive switching of nanoscale titanium oxide thin films
65Moisture barrier and chemical corrosion protection of silver-based telescope mirrors using aluminum oxide films by plasma-enhanced atomic layer deposition
66New grating concepts in the NIR and SWIR spectral band for high resolution earth-observation spectrometers
67Opportunities of Atomic Layer Deposition for Perovskite Solar Cells
68Optimization of Al2O3/TiO2 nanolaminate thin films prepared with different oxide ratios, for use in organic light-emitting diode encapsulation, via plasma-enhanced atomic layer deposition
69Oxygen migration in TiO2-based higher-k gate stacks
70Passivation of Al2O3/TiO2 on monocrystalline Si with relatively low reflectance
71Photo-Patternable ZnO Thin Films Based on Cross-Linked Zinc Acrylate for Organic/Inorganic Hybrid Complementary Inverters
72Photocatalytic activities of TiO2 thin films prepared on Galvanized Iron substrate by plasma-enhanced atomic layer deposition
73Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
74Plasma enhanced atomic layer batch processing of aluminum doped titanium dioxide
75Plasma Enhanced Atomic Layer Deposition on Powders
76Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
77Plasma-assisted atomic layer deposition of nanolaminates for gate dielectric applications
78Plasma-Enhanced ALD of TiO2 Thin Films on SUS 304 Stainless Steel for Photocatalytic Application
79Plasma-Enhanced ALD of TiO2 Using a Novel Cyclopentadienyl Alkylamido Precursor [Ti(CpMe)(NMe2)3] and O2 Plasma
80Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4
81Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
82Plasma-Enhanced Atomic Layer Deposition of TiO2 and Al-Doped TiO2 Films Using N2O and O2 Reactants
83Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
84Relationships among growth mechanism, structure and morphology of PEALD TiO2 films: the influence of O2 plasma power, precursor chemistry and plasma exposure mode
85Room temperature atomic layer deposition of TiO2 on gold nanoparticles
86Room temperature plasma enhanced atomic layer deposition for TiO2 and WO3 films
87Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD
88Rutile-structured TiO2 deposited by plasma enhanced atomic layer deposition using tetrakis(dimethylamino)titanium precursor on in-situ oxidized Ru electrode
89Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
90Substrate Dependent Growth Rate of Plasma-Enhanced Atomic Layer Deposition of Titanium Oxide Using N2O Gas
91Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
92Surface Etching of TiO2 Thin Films Using High Density Cl2/Ar Plasma
93Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide
94Synthesis of bio-inspired multilayer polarizers and their application to anti-counterfeiting
95The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films
96The impact of ultra-thin titania interlayers on open circuit voltage and carrier lifetime in thin film solar cells
97The Mechanical Behavior of ALD-Polymer Hybrid Films Under Tensile Strain
98Theoretical and Experimental Investigation of Graphene/High-κ/p-Si Junctions
99Thermal and plasma enhanced atomic layer deposition of TiO2: Comparison of spectroscopic and electric properties
100Thermal and Plasma-Enhanced ALD of Ta and Ti Oxide Thin Films from Alkylamide Precursors
101Three dimensional ALD of TiO2 for in-vivo biomedical sensor applications
102TiO2/Al2O3/TiO2 Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition
103Transient characterization of the electroforming process in TiO2 based resistive switching devices
104Understanding the mechanisms of interfacial reactions during TiO2 layer growth on RuO2 by atomic layer deposition with O2 plasma or H2O as oxygen source
105X-ray Photoelectron Spectroscopy Analyses of Atomic Layer Deposition-Prepared Titanium-Dioxide Thin Films with Oxygen Sources and Their Annealing Effect

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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