TiO2 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing TiO2 films returned 107 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
13D-Branched ZnO/CdS Nanowire Arrays for Solar Water Splitting and the Service Safety Research
2A low-temperature-grown TiO2 -based device for the flexible stacked RRAM application
3A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
4Al2O3/TiO2 multilayer thin films grown by plasma enhanced atomic layer deposition for organic light-emitting diode passivation
5Al2O3/TiO2 nanolaminate gate dielectric films with enhanced electrical performances for organic field-effect transistors
6An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor
7Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
8Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
9Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
10Atomic layer deposition of epitaxial layers of anatase on strontium titanate single crystals: Morphological and photoelectrochemical characterization
11Atomic layer deposition of titanium dioxide using titanium tetrachloride and titanium tetraisopropoxide as precursors
12Atomic layer deposition TiO2-Al2O3 stack: An improved gate dielectric on Ga-polar GaN metal oxide semiconductor capacitors
13Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
14Band alignment of atomic layer deposited TiO2/multilayer MoS2 interface determined by x-ray photoelectron spectroscopy
15Biofilm prevention on cochlear implants
16Bipolar Resistive Switching Characteristics of HfO2/TiO2/HfO2 Trilayer-Structure RRAM Devices on Pt and TiN-Coated Substrates Fabricated by Atomic Layer Deposition
17Bipolar resistive switching in amorphous titanium oxide thin film
18Breakdown and Protection of ALD Moisture Barrier Thin Films
19Conformal Formation of (GeTe2)(1-x)(Sb2Te3)x Layers by Atomic Layer Deposition for Nanoscale Phase Change Memories
20Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
21Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
22Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition
23Effect of an Al2O3/TiO2 Passivation Layer on the Performance of Amorphous Zinc-Tin Oxide Thin-Film Transistors
24Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film
25Effects of TiO2 Interfacial Atomic Layers on Device Performances and Exciton Dynamics in ZnO Nanorod Polymer Solar Cells
26Efficiency Enhancement of Nanotextured Black Silicon Solar Cells Using Al2O3/TiO2 Dual-Layer Passivation Stack Prepared by Atomic Layer Deposition
27Electronic Instabilities Leading to Electroformation of Binary Metal Oxide-based Resistive Switches
28Employing Overlayers To Improve the Performance of Cu2BaSnS4 Thin Film based Photoelectrochemical Water Reduction Devices
29Energy-enhanced atomic layer deposition for more process and precursor versatility
30Enhanced photocatalytic performance in atomic layer deposition grown TiO2 thin films via hydrogen plasma treatment
31Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition
32Epitaxial 1D electron transport layers for high-performance perovskite solar cells
33Evaluation of Vapor Deposition Techniques for Membrane Pore Size Modification
34Fabrication of Highly Ordered and Well-Aligned PbTiO3/TiN Core-Shell Nanotube Arrays
35Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO2 layer
36Flexible Memristive Memory Array on Plastic Substrates
37Flexible Perovskite Photovoltaic Modules and Solar Cells Based on Atomic Layer Deposited Compact Layers and UV-Irradiated TiO2 Scaffolds on Plastic Substrates
38Fluorinated polymer-grafted organic dielectrics for organic field-effect transistors with low-voltage and electrical stability
39Gas permeation barriers deposited by atmospheric pressure plasma enhanced atomic layer deposition
40Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition
41Growth behavior and structural characteristics of TiO2 thin films using (CpN)Ti(NMe2)2 and oxygen remote plasma
42Half-wave phase retarder working in transmission around 630nm realized by atomic layer deposition of sub-wavelength gratings
43High rate roll to roll atomic layer deposition, and its application to moisture barriers on polymer films
44High-efficiency embedded transmission grating
45Highly efficient and bending durable perovskite solar cells: toward a wearable power source
46Highly reflective polymeric substrates functionalized utilizing atomic layer deposition
47Impedance spectroscopy analysis on the effects of TiO2 interfacial atomic layers in ZnO nanorod polymer solar cells: Effects of interfacial charge extraction on diffusion and recombination
48Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers
49In situ control of oxygen vacancies in TiO2 by atomic layer deposition for resistive switching devices
50In situ diagnostics for studying gas-surface reactions during thermal and plasma-assisted atomic layer deposition
51Influence of Atomic Layer Deposition Temperatures on TiO2/n-Si MOS Capacitor
52Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide
53Infrared Study on Room-temperature Atomic Layer Deposition of TiO2 Using Tetrakis(dimethylamino)titanium and Remote-Plasma Excited Water Vapor
54Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS
55Investigation of residual chlorine in TiO2 films grown by Atomic Layer Deposition
56Investigation of ultra-thin titania films as hole-blocking contacts for organic photovoltaics
57Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
58Large area photoelectrodes based on hybrids of CNT fibres and ALD-grown TiO2
59Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings
60Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
61Low temperature temporal and spatial atomic layer deposition of TiO2 films
62Low-Temperature ALD Growth of SrTiO3 Thin Films from Sr beta-Diketonates and Ti Alkoxide Precursors Using Oxygen Remote Plasma as an Oxidation Source
63Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
64Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
65Mesoporous perovskite solar cells and the role of nanoscale compact layers for remarkable all-round high efficiency under both indoor and outdoor illumination
66Microscopic origin of bipolar resistive switching of nanoscale titanium oxide thin films
67Moisture barrier and chemical corrosion protection of silver-based telescope mirrors using aluminum oxide films by plasma-enhanced atomic layer deposition
68New grating concepts in the NIR and SWIR spectral band for high resolution earth-observation spectrometers
69Opportunities of Atomic Layer Deposition for Perovskite Solar Cells
70Optimization of Al2O3/TiO2 nanolaminate thin films prepared with different oxide ratios, for use in organic light-emitting diode encapsulation, via plasma-enhanced atomic layer deposition
71Oxygen migration in TiO2-based higher-k gate stacks
72Passivation of Al2O3/TiO2 on monocrystalline Si with relatively low reflectance
73Photo-Patternable ZnO Thin Films Based on Cross-Linked Zinc Acrylate for Organic/Inorganic Hybrid Complementary Inverters
74Photocatalytic activities of TiO2 thin films prepared on Galvanized Iron substrate by plasma-enhanced atomic layer deposition
75Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
76Plasma enhanced atomic layer batch processing of aluminum doped titanium dioxide
77Plasma Enhanced Atomic Layer Deposition on Powders
78Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
79Plasma-assisted atomic layer deposition of nanolaminates for gate dielectric applications
80Plasma-Enhanced ALD of TiO2 Thin Films on SUS 304 Stainless Steel for Photocatalytic Application
81Plasma-Enhanced ALD of TiO2 Using a Novel Cyclopentadienyl Alkylamido Precursor [Ti(CpMe)(NMe2)3] and O2 Plasma
82Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4
83Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
84Plasma-Enhanced Atomic Layer Deposition of TiO2 and Al-Doped TiO2 Films Using N2O and O2 Reactants
85Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
86Relationships among growth mechanism, structure and morphology of PEALD TiO2 films: the influence of O2 plasma power, precursor chemistry and plasma exposure mode
87Room temperature atomic layer deposition of TiO2 on gold nanoparticles
88Room temperature plasma enhanced atomic layer deposition for TiO2 and WO3 films
89Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD
90Rutile-structured TiO2 deposited by plasma enhanced atomic layer deposition using tetrakis(dimethylamino)titanium precursor on in-situ oxidized Ru electrode
91Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
92Substrate Dependent Growth Rate of Plasma-Enhanced Atomic Layer Deposition of Titanium Oxide Using N2O Gas
93Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
94Surface Etching of TiO2 Thin Films Using High Density Cl2/Ar Plasma
95Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide
96Synthesis of bio-inspired multilayer polarizers and their application to anti-counterfeiting
97The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films
98The impact of ultra-thin titania interlayers on open circuit voltage and carrier lifetime in thin film solar cells
99The Mechanical Behavior of ALD-Polymer Hybrid Films Under Tensile Strain
100Theoretical and Experimental Investigation of Graphene/High-κ/p-Si Junctions
101Thermal and plasma enhanced atomic layer deposition of TiO2: Comparison of spectroscopic and electric properties
102Thermal and Plasma-Enhanced ALD of Ta and Ti Oxide Thin Films from Alkylamide Precursors
103Three dimensional ALD of TiO2 for in-vivo biomedical sensor applications
104TiO2/Al2O3/TiO2 Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition
105Transient characterization of the electroforming process in TiO2 based resistive switching devices
106Understanding the mechanisms of interfacial reactions during TiO2 layer growth on RuO2 by atomic layer deposition with O2 plasma or H2O as oxygen source
107X-ray Photoelectron Spectroscopy Analyses of Atomic Layer Deposition-Prepared Titanium-Dioxide Thin Films with Oxygen Sources and Their Annealing Effect

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

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