Publication Information

Title: The Effects of UV Exposure on Plasma-Enhanced Atomic Layer Deposition ZnO Thin Film Transistor

Type: Journal

Info: Electrochemical and Solid-State Letters, 13 (5) H151-H154 (2010)

Date: 2010-03-04

DOI: http://dx.doi.org/10.1149/1.3322733

Author Information

Name

Institution

Pohang University of Science and Technology (POSTECH)

Yonsei University

Yonsei University

Pohang University of Science and Technology (POSTECH)

Dankook University

Yonsei University

Films

Plasma ZnO using Custom

Deposition Temperature = 200C

557-20-0

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

Rudolf AutoEL II

Chemical Binding

XPS, X-ray Photoelectron Spectroscopy

Unknown

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Unknown

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Unknown

Resistivity, Sheet Resistance

Hall Measurements

Unknown

Transfer Curves

I-V, Current-Voltage Measurements

Keithley 4200-SCS

Off Current

I-V, Current-Voltage Measurements

Keithley 4200-SCS

On/Off Current Ratio

I-V, Current-Voltage Measurements

Keithley 4200-SCS

Subthreshold Swing

I-V, Current-Voltage Measurements

Keithley 4200-SCS

Mobility

I-V, Current-Voltage Measurements

Keithley 4200-SCS

Threshold Voltage

I-V, Current-Voltage Measurements

Keithley 4200-SCS

Substrates

Al2O3

Glass

Corning 1737

Keywords

TCO, Transparent Conducting Oxide

TFT, Thin Film Transistor

Notes

ZnO etched with dilute HCl

48

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

Follow plasma-ald.com

Follow @PlasmaALDGuy Tweet

Shortcuts



© 2014-2017 plasma-ald.com