Publication Information

Title: Plasma-Assisted ALD of an Al2O3 Permeation Barrier Layer on Plastic

Type: Journal

Info: Plasma Science and Technology, Vol.14, No.2, 2012

Date: 2011-11-04

DOI: http://dx.doi.org/10.1088/1009-0630/14/2/09

Author Information

Name

Institution

Beijing Institute of Graphic Communication

Beijing Institute of Graphic Communication

Beijing Institute of Graphic Communication

Beijing Institute of Graphic Communication

Films

Deposition Temperature = 25C

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

Horiba Jobin Yvon

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

Veeco AFM

Oxygen Transmission Rate (OTR)

Oxygen Transmission Rate (OTR)

Systech Illinois Oxygen permeation analyzer 8001

Wetting Angle

Contact Angle Measurement

Kruss

Substrates

PET, Polyethylene Terephthalate

Keywords

Diffusion Barrier

Notes

661

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

Follow plasma-ald.com

Follow @PlasmaALDGuy Tweet

Shortcuts



© 2014-2017 plasma-ald.com