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In Situ Activation of an Indium(III) Triazenide Precursor for Epitaxial Growth of Indium Nitride by Atomic Layer Deposition
Type:
Journal
Info:
Chem. Mater. 2020, 32, 4481-4489
Date:
2020-04-24
Author Information
| Name | Institution |
|---|---|
| Nathan J. O'Brien | Linköping University |
| Polla Rouf | Linköping University |
| Rouzbeh Samii | Linköping University |
| Karl Rönnby | Linköping University |
| Sydney C. Buttera | Carleton University |
| Chih-Wei Hsu | Linköping University |
| Ivan G. Ivanov | Linköping University |
| Vadim Kessler | Swedish University of Agricultural Sciences |
| Lars Ojamäe | A*STAR (Agency for Science, Technology and Research) |
| Henrik Pedersen | A*STAR (Agency for Science, Technology and Research) |
Films
Plasma InN
Film/Plasma Properties
Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: GIXRD, Grazing Incidence X-Ray Diffraction
Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Compositional Depth Profiling
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Raman Spectra
Analysis: Raman Spectroscopy
Substrates
| SiC |
Notes
| 1494 |