InN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing InN films returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Atomic layer epitaxy for quantum well nitride-based devices
2Epitaxial Growth of Cubic and Hexagonal InN Thin Films via Plasma-Assisted Atomic Layer Epitaxy
3Influence of N2/H2 and N2 plasma on binary III-nitride films prepared by hollow-cathode plasma-assisted atomic layer deposition
4Low-temperature grown wurtzite InxGa1-xN thin films via hollow cathode plasma-assisted atomic layer deposition
5Low-temperature hollow cathode plasma-assisted atomic layer deposition of crystalline III-nitride thin films and nanostructures
6Low-temperature self-limiting atomic layer deposition of wurtzite InN on Si(100)
7Low-temperature sequential pulsed chemical vapor deposition of ternary BxGa1-xN and BxIn1-xN thin film alloys
8Perspectives on future directions in III-N semiconductor research
9Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods


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