Picosun R200 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Picosun R200 hardware returned 24 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1AlN Surface Passivation of GaN-Based High Electron Mobility Transistors by Plasma-Enhanced Atomic Layer Deposition
2Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
3Atomic layer deposition of Co3O4 on carbon nanotubes/carbon cloth for high-capacitance and ultrastable supercapacitor electrode
4Atomic Layer Deposition of Gold Metal
5Atomic layer deposition of platinum with enhanced nucleation and coalescence by trimethylaluminum pre-pulsing
6Atomic Layer Engineering of Er-Ion Distribution in Highly Doped Er:Al2O3 for Photoluminescence Enhancement
7Characterization of CVD graphene permittivity and conductivity in micro-/millimeter wave frequency range
8Comparative study of ALD SiO2 thin films for optical applications
9Direct Growth of Al2O3 on Black Phosphorus by Plasma-Enhanced Atomic Layer Deposition
10Excellent resistive switching properties of atomic layer-deposited Al2O3/HfO2/Al2O3 trilayer structures for non-volatile memory applications
11High-resolution, high-aspect-ratio iridium-nickel composite nanoimprint molds
12In Situ Control of Oxygen Vacancies in TaOx Thin Films via Plasma-Enhanced Atomic Layer Deposition for Resistive Switching Memory Applications
13In situ plasma enhanced atomic layer deposition half cycle study of Al2O3 on AlGaN/GaN high electron mobility transistors
14Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films
15Low-temperature remote plasma-enhanced atomic layer deposition of graphene and characterization of its atomic-level structure
16PEALD AlN: controlling growth and film crystallinity
17Plasma assisted atomic layer deposited hafnium oxide films for silicon surface passivation
18Plasma enhanced atomic layer deposited platinum thin film on Si substrate with TMA pretreatment
19Plasma Enhanced Atomic Layer Deposition of Al2O3/SiO2 MIM Capacitors
20Plasma-Assisted Atomic Layer Deposition of High-Density Ni Nanoparticles for Amorphous In-Ga-Zn-O Thin Film Transistor Memory
21Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films
22Study of Atomic Layer Deposition of Indium Oxy-sulfide films for Cu(In,Ga)Se2 solar cells
23Synthesis of indium oxi-sulfide films by atomic layer deposition: The essential role of plasma enhancement
24Tris(dimethylamido)aluminum(III): An overlooked atomic layer deposition precursor

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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