Picosun R200 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Picosun R200 hardware returned 32 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

1AlN Surface Passivation of GaN-Based High Electron Mobility Transistors by Plasma-Enhanced Atomic Layer Deposition
2Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
3Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma
4Atomic layer deposition of Co3O4 on carbon nanotubes/carbon cloth for high-capacitance and ultrastable supercapacitor electrode
5Atomic Layer Deposition of Gold Metal
6Atomic layer deposition of platinum with enhanced nucleation and coalescence by trimethylaluminum pre-pulsing
7Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero-Oxidation State Precursor
8Atomic Layer Engineering of Er-Ion Distribution in Highly Doped Er:Al2O3 for Photoluminescence Enhancement
9Bipolar Resistive Switching Characteristics of HfO2/TiO2/HfO2 Trilayer-Structure RRAM Devices on Pt and TiN-Coated Substrates Fabricated by Atomic Layer Deposition
10Blistering mechanisms of atomic-layer-deposited AlN and Al2O3 films
11Characterization of CVD graphene permittivity and conductivity in micro-/millimeter wave frequency range
12Comparative study of ALD SiO2 thin films for optical applications
13Direct Growth of Al2O3 on Black Phosphorus by Plasma-Enhanced Atomic Layer Deposition
14Efficient Catalytic Microreactors with Atomic-Layer-Deposited Platinum Nanoparticles on Oxide Support
15Excellent resistive switching properties of atomic layer-deposited Al2O3/HfO2/Al2O3 trilayer structures for non-volatile memory applications
16High-resolution, high-aspect-ratio iridium-nickel composite nanoimprint molds
17In Situ Control of Oxygen Vacancies in TaOx Thin Films via Plasma-Enhanced Atomic Layer Deposition for Resistive Switching Memory Applications
18In situ plasma enhanced atomic layer deposition half cycle study of Al2O3 on AlGaN/GaN high electron mobility transistors
19Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films
20Interfacial, Electrical, and Band Alignment Characteristics of HfO2/Ge Stacks with In Situ-Formed SiO2 Interlayer by Plasma-Enhanced Atomic Layer Deposition
21Low-temperature remote plasma-enhanced atomic layer deposition of graphene and characterization of its atomic-level structure
22PEALD AlN: controlling growth and film crystallinity
23Plasma assisted atomic layer deposited hafnium oxide films for silicon surface passivation
24Plasma enhanced atomic layer deposited platinum thin film on Si substrate with TMA pretreatment
25Plasma Enhanced Atomic Layer Deposition of Al2O3/SiO2 MIM Capacitors
26Plasma-Assisted Atomic Layer Deposition of High-Density Ni Nanoparticles for Amorphous In-Ga-Zn-O Thin Film Transistor Memory
27Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films
28Study of Atomic Layer Deposition of Indium Oxy-sulfide films for Cu(In,Ga)Se2 solar cells
29Surface Passivation of Silicon Using HfO2 Thin Films Deposited by Remote Plasma Atomic Layer Deposition System
30Synthesis of indium oxi-sulfide films by atomic layer deposition: The essential role of plasma enhancement
31Systematic efficiency study of line-doubled zone plates
32Tris(dimethylamido)aluminum(III): An overlooked atomic layer deposition precursor


I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

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