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Zr(TMHD)4, tetrakis(2,2,6,6-tetramethyl-3,5- heptanedionato) zirconium, CAS# 18865-74-2
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|1||Strem Chemicals, Inc.||Tetrakis(2,2,6,6-tetramethyl-3,5-heptanedionato)zirconium (IV), 99% Zr(TMHD)4|
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Plasma Enhanced Atomic Layer Deposition Film Publications
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