TEMASi, (EtMeN)4Si, [(C2H5)(CH3)N]4Si, Tetrakis(EthylMethylAmido) Silicon, Silicon Ethylmethylamide, CAS# 477284-75-6
Where to buy
|1||Strem Chemicals, Inc.||🇺🇸||Tetrakis(ethylmethylamino)silane, 98%, TEMAS|
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Plasma Enhanced Atomic Layer Deposition Film Publications
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