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Ti(TMHD)3, tris(2,2,6,6-tetramethyl-3,5-heptanedionato) titanium, CAS# 181418-64-4
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|1||Strem Chemicals, Inc.||🇺🇸||Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)titanium(III), min. 97% Ti(TMHD)3|
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Plasma Enhanced Atomic Layer Deposition Film Publications
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