Search 1616 plasma ALD publications by:
TEMATi, (EtMeN)4Ti, [(C2H5)(CH3)N]4Ti, Tetrakis(EthylMethylAmido) Titanium, Titanium Ethylmethylamide, CAS# 308103-54-0
Where to buy
|1||Gelest||Titanium Tetrakis(Ethylmethylamide), 99+%|
|2||Sigma-Aldrich, Co. LLC||Tetrakis(ethylmethylamido)titanium(IV)|
|4||Strem Chemicals, Inc.||Tetrakis(ethylmethylamino)titanium, 99% (99.99%-Ti) PURATREM|
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Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Photoelectrochemical hydrogen production on silicon microwire arrays overlaid with ultrathin titanium nitride|
|2||Plasma-Enhanced Atomic Layer Deposition (PEALD) of TiN using the Organic Precursor Tetrakis(ethylmethylamido)Titanium (TEMAT)|