Tetrakis(ethylmethylamido)titanium, TEMAT, CAS# 308103-54-0

Where to buy

NumberVendorLink
1Sigma-Aldrich, Co. LLCTetrakis(ethylmethylamido)titanium(IV)
2EreztechBis(diethylamido)bis(dimethylamido)titanium(IV)

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Photoelectrochemical hydrogen production on silicon microwire arrays overlaid with ultrathin titanium nitride
2Plasma-Enhanced Atomic Layer Deposition (PEALD) of TiN using the Organic Precursor Tetrakis(ethylmethylamido)Titanium (TEMAT)


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