Your search for publications using this chemistry returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma|
|2||In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd|
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