Cyclopentadienyl ethyl (dicarbonyl) Ruthenium, CpRu(CO)2Et, CAS# 0-0-0

Plasma Enhanced Atomic Layer Deposition Film Publications

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1Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
2In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd