NbCl5, Niobium(V) chloride, Niobium pentachloride, CAS# 10026-12-7

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Atomic Layer Deposition of Niobium Nitride from Different Precursors
2Tribological properties of thin films made by atomic layer deposition sliding against silicon