|1||Ereztech||Niobium (V) chloride (99.999%-Nb)|
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Your search for publications using this chemistry returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic Layer Deposition of Niobium Nitride from Different Precursors|
|2||Tribological properties of thin films made by atomic layer deposition sliding against silicon|
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