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Ru(TMHD)3, tris(2,2,6,6-tetramethyl-3,5- heptanedionato) ruthenium, CAS# 38625-54-6
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|1||Strem Chemicals, Inc.||Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)ruthenium (III), 99% (99.9%-Ru) [Ru(TMHD)3]|
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Plasma Enhanced Atomic Layer Deposition Film Publications
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