La(EtCp)3, tris(ethylcyclopentadienyl) lanthanum, CAS# 404009-15-0

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition of La2O3 Thin Films by Using an Electron Cyclotron Resonance Plasma Source
2Lanthanum-Oxide Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition


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