La(EtCp)3, tris(ethylcyclopentadienyl) lanthanum, CAS# 404009-15-0
Plasma Enhanced Atomic Layer Deposition Film Publications
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|1||Lanthanum-Oxide Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition|
|2||Atomic Layer Deposition of La2O3 Thin Films by Using an Electron Cyclotron Resonance Plasma Source|