Acetylacetone, CAS# 123-54-6
Plasma Enhanced Atomic Layer Deposition Film Publications
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|1||Area-Selective Atomic Layer Deposition of Two-Dimensional WS2 Nanolayers|
|2||Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle|