dicobalt octacarbonyl, Co2(CO)8, CAS# 10210-68-1

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1EreztechDicobalt Octacarbonyl

Plasma Enhanced Atomic Layer Deposition Film Publications

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NumberTitle
1Characteristics of Cobalt Thin Films Deposited by Remote Plasma ALD Method with Dicobalt Octacarbonyl
2Comparison of Co Films Deposited by Remote Plasma Atomic Layer Deposition Method with Cyclopentadienylcobalt Dicarbonyl [CpCo(CO)2] and Dicobalt Octacarbonyl [Co2(CO)8]