Ti(CpMe)(NMe2)3, Tris(dimethylamido)methylcyclopentadienyl titanium, CAS# 0-0-0

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Flexible Perovskite Photovoltaic Modules and Solar Cells Based on Atomic Layer Deposited Compact Layers and UV-Irradiated TiO2 Scaffolds on Plastic Substrates
2Opportunities of Atomic Layer Deposition for Perovskite Solar Cells
3Plasma-Enhanced ALD of TiO2 Using a Novel Cyclopentadienyl Alkylamido Precursor [Ti(CpMe)(NMe2)3] and O2 Plasma
4Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films


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