3DMAAl, (Me2N)3Al, (Me2N)6Al2, Tris (DiMethylAmido) Aluminum(III), CAS# 32093-39-3

Where to buy

1EreztechTris(dimethylamino)aluminum (99.9%-Al)
2Strem Chemicals, Inc.Hexakis(dimethylamino)dialuminum 98% (99.9%-Al) TDMAA

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Tris(dimethylamido)aluminum(III): An overlooked atomic layer deposition precursor
2Tris(dimethylamido)aluminum(III): An overlooked atomic layer deposition precursor


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