3DMAAl, (Me2N)3Al, (Me2N)6Al2, Tris (DiMethylAmido) Aluminum(III), CAS# 32093-39-3

Where to buy

NumberVendorLink
1EreztechTris(dimethylamino)aluminum
2Strem Chemicals, Inc.Hexakis(dimethylamino)dialuminum 98% (99.9%-Al) TDMAA
3Alfa AesarTris(dimethylamino)aluminum dimer
4Santa Cruz BiotechnologyAluminum dimethylamide
5Sigma-Aldrich, Co. LLCTris(dimethylamido)aluminum(III)

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Tris(dimethylamido)aluminum(III): An overlooked atomic layer deposition precursor
2A comparative study of AlN and Al2O3 based gate stacks grown by atomic layer deposition on InGaAs
3Tris(dimethylamido)aluminum(III): An overlooked atomic layer deposition precursor