2021 Year in Review
The publication database currently has 1616 entries.
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202 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
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Tailoring angular selectivity in SiO2 slanted columnar thin films using atomic layer deposition of titanium nitride
Characterization of Molybdenum Oxide Thin Films Grown by Atomic Layer Deposition
Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition
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Tris N,N-bis(trimethylsilyl)amide yttrium (III), CAS# 41836-28-6
Where to buy
| Number | Vendor | Link |
|---|---|---|
| 1 | Strem Chemicals, Inc. | Tris N,N-bis(trimethylsilyl)amide yttrium (III), min. 98% (99.9%-Y) (REO) |
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Plasma Enhanced Atomic Layer Deposition Film Publications
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