Search 1556 plasma ALD publications by:
Search 1556 plasma ALD publications by:
Tris N,N-bis(trimethylsilyl)amide yttrium (III), CAS# 41836-28-6
Where to buy
Number | Vendor | Link |
---|---|---|
1 | Strem Chemicals, Inc. | Tris N,N-bis(trimethylsilyl)amide yttrium (III), min. 98% (99.9%-Y) (REO) |
Plasma Enhanced Atomic Layer Deposition Film Publications
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Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |