3DMAB, TDMAB, (Me2N)3B, (CH3)2N)3B, Tris(dimethylamido)borane, CAS# 4375-83-1

Informational Websites

NumberWebsite
1http://webbook.nist.gov/cgi/cbook.cgi?ID=4375-83-1
2https://pubchem.ncbi.nlm.nih.gov/compound/Tris_dimethylamino_borane#section=Top
3http://webbook.nist.gov/cgi/cbook.cgi?ID=C4375831&Mask=20

Where to buy

NumberVendorLink
1EreztechTris(dimethylamino) borane

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Diffusion of Phosphorus and Boron from Atomic Layer Deposition Oxides into Silicon
2Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon