Search 1628 plasma ALD publications by:
3DMAB, TDMAB, (Me2N)3B, (CH3)2N)3B, Tris(dimethylamido)borane, CAS# 4375-83-1
Where to buy
|1||Sigma-Aldrich, Co. LLC||Tris(dimethylamino)borane 99%|
|3||Santa Cruz Biotechnology||Tris(dimethylamido)borane (CAS 4375-83-1)|
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Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Diffusion of Phosphorus and Boron from Atomic Layer Deposition Oxides into Silicon|
|2||Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon|