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Vibrational Properties Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Vibrational Properties returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

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1Influence of N2/H2 and N2 plasma on binary III-nitride films prepared by hollow-cathode plasma-assisted atomic layer deposition

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Mark Sowa

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