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An economical, compact inductively coupled plasma source.

Ideal for:
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Thermal Conductivity Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Thermal Conductivity returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Thermal conductivity measurement of amorphous dielectric multilayers for phase-change memory power reduction
2Thermal conductivity of ultrathin BaTiO3 films grown by plasma-assisted atomic layer deposition