Thermal Conductivity Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Thermal Conductivity returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Thermal conductivity measurement of amorphous dielectric multilayers for phase-change memory power reduction
2Thermal conductivity of ultrathin BaTiO3 films grown by plasma-assisted atomic layer deposition