Your search for plasma enhanced atomic layer deposition publications discussing Doping Density returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Schottky Diodes on ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition|
|2||Work function tuning of plasma-enhanced atomic layer deposited WCxNy electrodes for metal/oxide/semiconductor devices|
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