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Dielectric Function Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Dielectric Function returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
2Redshift and amplitude increase in the dielectric function of corundum-like α-(TixGa1-x)2O3