Search 1628 plasma ALD publications by:
Search 1628 plasma ALD publications by:
Dielectric Function Plasma Enhanced Atomic Layer Deposition Publications
Your search for plasma enhanced atomic layer deposition publications discussing Dielectric Function returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
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1 | In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd |