The publication database currently has 1609 entries.
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202 Films Compositions
272 Precursors and Plasma Gases
76 Deposition Hardwares
249 Film and Plasma Characteristics
85 Theses
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Growth of Gallium Nitride Films on Multilayer Graphene Template Using Plasma-Enhanced Atomic Layer Deposition
Ni80Fe20 nanotubes with optimized spintronic functionalities prepared by atomic layer deposition
On the Contact Optimization of ALD-Based MoS2 FETs: Correlation of Processing Conditions and Interface Chemistry with Device Electrical Performance
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Dielectric Function Plasma Enhanced Atomic Layer Deposition Publications
Your search for plasma enhanced atomic layer deposition publications discussing Dielectric Function returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd |