Introducing Plasma ALD, LLC's first in-house product.

An economical, compact inductively coupled plasma source.

Ideal for:

  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

Contact us for more information.



Where to buy TaCl5, Tantalum Pentachloride CAS# 7721-01-9

TaCl5, Tantalum Pentachloride CAS# 7721-01-9 is available from the following source(s):

NumberVendorRegionLink
1Pegasus ChemicalsπŸ‡¬πŸ‡§Tantalum (V) Chloride
2EreztechπŸ‡ΊπŸ‡ΈTantalum(V) chloride

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