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Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy
Innovative remote plasma source for atomic layer deposition for GaN devices
Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
Optical in situ monitoring of plasma-enhanced atomic layer deposition process
The role of active species in the N2 and N2-H2 RF afterglows on selective surface nitriding of ALD-grown TiO2 films
Where to buy TDEATi, (Et2N)4Ti, [(C2H5)2N]4Ti, Tetrakis(DiEthylAmido) Titanium, Titanium Diethylamide CAS# 4419-47-0
TDEATi, (Et2N)4Ti, [(C2H5)2N]4Ti, Tetrakis(DiEthylAmido) Titanium, Titanium Diethylamide CAS# 4419-47-0 is available from the following source(s):
| Number | Vendor | Region | Link |
|---|---|---|---|
| 1 | Ereztech | 🇺🇸 | Tetrakis(diethylamino) titanium(IV) |
| 2 | Gelest | 🇺🇸 | Titanium Tetrakis(Diethylamide), 99+% |
| 3 | Strem Chemicals, Inc. | 🇺🇸 | Tetrakis(diethylamino)titanium(IV), 99% |
| 4 | Strem Chemicals, Inc. | 🇺🇸 | Tetrakis(diethylamino)titanium(IV), 99%, 22-1050, contained in 50 ml cylinder (96-1070) for CVD/ALD |
| 5 | EpiValence | 🇬🇧 | Titanium diethylamide |
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