The publication database currently has 1489 entries.

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187 Films Compositions

401 Precursors and Plasma Gases

72 Deposition Hardwares

238 Film and Plasma Characteristics

76 Theses

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Plasma-Assisted ALD of Highly Conductive HfN_x: On the Effect of Energetic Ions on Film Microstructure Control of ion-flux and ion-energy in direct inductively coupled plasma reactor for interfacial-mixing plasma-enhanced atomic layer deposition Wet Chemical Oxidation to Improve Interfacial Properties of Al₂O₃/Si and Interface Analysis of Al₂O₃/SiO_x/Si Structure Using Surface Carrier Lifetime Simulation and Capacitance-Voltage Measurement

Search 1489 plasma ALD publications by:

187 Films Compositions

401 Precursors and Plasma Gases

72 Deposition Hardwares

238 Film and Plasma Characteristics

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Popular Films

Recently Added Films

Popular Precursors

Bis(DiEthylAmido)Silane
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Tris(DiMethylAmido) Cyclopentadienyl Hafnium
Tris(DiEthylamido) (Tert-Butylimido) Niobium
Trimethoxy(pentamethylcyclopentadienyl) Titanium

Top Authors

Erwin (W.M.M.) Kessels
Hyeongtag Jeon
Hyungjun Kim
Mauritius C. M. (Richard) van de Sanden
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