Ti Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ti films returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Growth kinetics and initial stage growth during plasma-enhanced Ti atomic layer deposition
2Plasma-enhanced atomic layer deposition of Ta and Ti for interconnect diffusion barriers


I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

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