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Ti Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications discussing Ti films returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Growth kinetics and initial stage growth during plasma-enhanced Ti atomic layer deposition |
| 2 | Plasma-enhanced atomic layer deposition of Ta and Ti for interconnect diffusion barriers |