BaTiO3 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing BaTiO3 films returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1High Energy Density Capacitor By Plasma-Treated ALD BaTiO3 Thin Films
2Plasma Processing for Crystallization and Densification of Atomic Layer Deposition BaTiO3 Thin Films
3Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
4Plasma-enhanced atomic layer deposition of BaTiO3


I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at:


Follow @PlasmaALDGuy


© 2014-2018