Publication Information

Title: High Energy Density Capacitor By Plasma-Treated ALD BaTiO3 Thin Films

Type: Conference Proceedings

Info: 228th ECS Meeting, October 11-15, 2015

Date: 2015-10-11

DOI: https://ecs.confex.com/ecs/228/webprogram/Paper60722.html

Author Information

Name

Institution

Stanford University

Stanford University

Films

Other BaTiO3 using Unknown

Deposition Temperature = 250C

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Dielectric Constant, Permittivity

Unknown

Unknown

Leakage Current

Unknown

Unknown

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

Unknown

Unknown

Density

Unknown

Unknown

Substrates

Keywords

Notes

485

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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