Your search for publications using this chemistry returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Alumina films as gas barrier layers grown by spatial atomic layer deposition with trimethylaluminum and different oxygen sources|
|2||Working gas effect on properties of Al2O3 film in plasma-enhanced atomic layer deposition|
|3||Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition|
|4||Low temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties|
|5||Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition|
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