Effective Charge Density Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Effective Charge Density returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Current transport mechanisms in plasma-enhanced atomic layer deposited AlN thin films
2Effect of Film Thickness on the Electrical Properties of AlN Films Prepared by Plasma-Enhanced Atomic Layer Deposition
3Impact of the firing step on Al2O3 passivation on p-type Czochralski Si wafers: Electrical and chemical approaches
4Plasma assisted atomic layer deposited hafnium oxide films for silicon surface passivation


I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

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