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Initial Growth and Crystallization Onset of Plasma Enhanced-Atomic Layer Deposited ZnO
Type:
Journal
Info:
Crystals 2020, 10(4), 291
Date:
2020-04-08
Author Information
| Name | Institution |
|---|---|
| Alberto Perrotta | Graz University of Technology |
| Julian Pilz | Graz University of Technology |
| Roland Resel | Graz University of Technology |
| Oliver Werzer | University of Graz |
| Anna Maria Coclite | Graz University of Technology |
Films
Plasma ZnO
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Characteristic: Morphology, Roughness, Topography
Analysis: XRR, X-Ray Reflectivity
Characteristic: Electron Concentration
Analysis: XRR, X-Ray Reflectivity
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Chemical Composition, Impurities
Analysis: XRF, X-Ray Fluorescence
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Substrates
| Si with native oxide |
Notes
| 1487 |