Search 1628 plasma ALD publications by:
4DMASi, TDMASi, (Me2N)4Si, [(CH3)2N]4Si, Tetrakis(DiMethylAmido) Silane, Silicon Dimethylamide, CAS# 1624-01-7
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Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition|