MCS, MonoChloroSilane, H3ClSi, CAS# 13465-78-6
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Challenges in spacer process development for leading-edge high-k metal gate technology |