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Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy
Innovative remote plasma source for atomic layer deposition for GaN devices
Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
Optical in situ monitoring of plasma-enhanced atomic layer deposition process
The role of active species in the N2 and N2-H2 RF afterglows on selective surface nitriding of ALD-grown TiO2 films
Al(OEt)3, Al(OC2H5)3, Aluminum Ethoxide, Aluminum Triethoxide, Triethoxyaluminum, Aluminium Triethanolate, CAS# 555-75-9
Informational Websites
| Number | Website |
|---|---|
| 1 | https://en.wikipedia.org/wiki/Aluminium_triethoxide |
Where to buy
| Number | Vendor | Region | Link |
|---|---|---|---|
| 1 | Alfa Aesar | 🇺🇸 | Aluminum ethoxide |
| 2 | Ereztech | 🇺🇸 | Aluminum ethoxide |
| 3 | Gelest | 🇺🇸 | Aluminum Ethoxide |
| 4 | Pegasus Chemicals | 🇬🇧 | Aluminium ethoxide |
| 5 | Strem Chemicals, Inc. | 🇺🇸 | Aluminum ethoxide, 99% |
| 6 | Sigma-Aldrich, Co. LLC | 🇺🇸 | Aluminum ethoxide 97% |
| 7 | TCI | 🇺🇸 | Aluminum Ethoxide |
| 8 | American Elements | 🇺🇸 | Aluminum Ethoxide |
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Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Radical Enhanced Atomic Layer Deposition of Metals and Oxides |