The publication database currently has 1562 entries.
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194 Films Compositions
265 Precursors and Plasma Gases
75 Deposition Hardwares
242 Film and Plasma Characteristics
83 Theses
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Search 1562 plasma ALD publications by:
Search 1562 plasma ALD publications by:
Al(OEt)3, Al(OC2H5)3, Aluminum Ethoxide, Aluminum Triethoxide, Triethoxyaluminum, Aluminium Triethanolate, CAS# 555-75-9
Informational Websites
| Number | Website |
|---|---|
| 1 | https://en.wikipedia.org/wiki/Aluminium_triethoxide |
Where to buy
| Number | Vendor | Link |
|---|---|---|
| 1 | Ereztech | Aluminum ethoxide |
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Radical Enhanced Atomic Layer Deposition of Metals and Oxides |
Popular Precursors
Top Authors
| Erwin (W.M.M.) Kessels |
| Hyeongtag Jeon |
| Hyungjun Kim |
| Mauritius C. M. (Richard) van de Sanden |
| Christophe Detavernier |