DMDCS, Dimethyldichlorosilane, Si(CH3)2Cl2, CAS# 75-78-5
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Challenges in atomic layer deposition of carbon-containing silicon-based dielectrics|