DMDCS, Dimethyldichlorosilane, Si(CH3)2Cl2, CAS# 75-78-5

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Challenges in atomic layer deposition of carbon-containing silicon-based dielectrics