Search 1628 plasma ALD publications by:
ATSB, Al(OsBu)3, Al(OCHMeEt)3, Al[OCH(CH3)C2H5]3, Aluminum tri-sec-butoxide, CAS# 2269-22-9
Where to buy
|1||Sigma-Aldrich, Co. LLC||Aluminum-tri-sec-butoxide|
|3||Strem Chemicals, Inc.||Aluminum s-butoxide, 98%|
|4||American Elements||Aluminum tri-sec-butoxide|
|5||Alfa Aesar||Aluminum sec-butoxide, 97%|
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Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films|