Search 1636 plasma ALD publications by:
AsH3, Arsine, CAS# 7784-42-1
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Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic layer epitaxy of gallium arsenide with the use of atomic hydrogen|