Tert-Butylimido,Tris(EthylMethylamino)Tantalum, Ta[N(CH3)(C2H5)]3[=NC(CH3)3], TBTEMT, CAS# 511292-99-2

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1EreztechTris(ethylmethylamido) (tert-butylimido) tantalum(V)

Plasma Enhanced Atomic Layer Deposition Film Publications

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1Plasma Enhanced Atomic Layer Deposition of TaN Films for Advanced Interconnects