Tert-Butylimido,Tris(EthylMethylamino)Tantalum, Ta[N(CH3)(C2H5)]3[=NC(CH3)3], TBTEMT, CAS# 511292-99-2

Where to buy

2EreztechπŸ‡ΊπŸ‡ΈTris(ethylmethylamido) (tert-butylimido) tantalum(V)
3Strem Chemicals, Inc.πŸ‡ΊπŸ‡Έ(t-Butylimido)tris(ethylmethylamino)tantalum(V), (99.99%-Ta) PURATREM
4Pegasus ChemicalsπŸ‡¬πŸ‡§Tris(ethylmethylamido)(tert-butylimido)tantalum(V)

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Plasma Enhanced Atomic Layer Deposition Film Publications

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1Plasma Enhanced Atomic Layer Deposition of TaN Films for Advanced Interconnects