Search 1628 plasma ALD publications by:
Search 1628 plasma ALD publications by:
Molybdenum(V) chloride, [MoCl5]2, CAS# 10241-05-1
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
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1 | Radical Enhanced Atomic Layer Deposition of Metals and Oxides |