The publication database currently has 1604 entries.
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200 Films Compositions
271 Precursors and Plasma Gases
76 Deposition Hardwares
249 Film and Plasma Characteristics
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Molybdenum(V) chloride, [MoCl5]2, CAS# 10241-05-1
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Radical Enhanced Atomic Layer Deposition of Metals and Oxides |