Search 1628 plasma ALD publications by:
Tris(dimethylamino)chlorosilane, 3DMASiCl, CAS# 13307-05-6
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Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition|