Tris(dimethylamino)chlorosilane, 3DMASiCl, CAS# 13307-05-6

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NumberVendorLink
1EreztechTris(dimethylamino)chlorosilane

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition