|1||Strem Chemicals, Inc.||(3,3-Dimethyl-1-butyne)dicobalt hexacarbonyl, 98% CCTBA|
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Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Plasma-enhanced atomic layer deposition (PEALD) of cobalt thin films for copper direct electroplating|
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