Search 1636 plasma ALD publications by:
Dicobalt Hexacarbonyl Tert-ButylAcetylene (CCTBA), CAS# 56792-69-9
Where to buy
|1||Strem Chemicals, Inc.||🇺🇸||(3,3-Dimethyl-1-butyne)dicobalt hexacarbonyl, 98% CCTBA|
|2||Ereztech||🇺🇸||(3,3-Dimethyl-1-butyne) dicobalt hexacarbonyl|
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Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Plasma-enhanced atomic layer deposition (PEALD) of cobalt thin films for copper direct electroplating|