CTA-1, Adeka Corporation Proprietary Cu(II)-aminoalkoxide, CAS# 0-0-0

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Island Coalescence during Film Growth: An Underestimated Limitation of Cu ALD