Search 1628 plasma ALD publications by:
(MeCp)W(CO)2(NO), methylcyclopentadienyl dicarbonyl nitrosyl tungsten, CAS# 0-0-0
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|1||Ereztech||(n5-methylcyclopentadienyl) dicarbonylnitrosyl tungsten|
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Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Characteristics of WNxCy films deposited using remote plasma atomic layer deposition with (MeCp)W(CO)2(NO) for Cu diffusion barrier|