(MeCp)W(CO)2(NO), methylcyclopentadienyl dicarbonyl nitrosyl tungsten, CAS# 0-0-0

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1Ereztech(n5-methylcyclopentadienyl) dicarbonylnitrosyl tungsten

Plasma Enhanced Atomic Layer Deposition Film Publications

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1Characteristics of WNxCy films deposited using remote plasma atomic layer deposition with (MeCp)W(CO)2(NO) for Cu diffusion barrier