TDEATi, (Et2N)4Ti, [(C2H5)2N]4Ti, Tetrakis(DiEthylAmido) Titanium, Titanium Diethylamide, CAS# 4419-47-0

Where to buy

1Strem Chemicals, Inc.πŸ‡ΊπŸ‡ΈTetrakis(diethylamino)titanium(IV), 99%, 22-1050, contained in 50 ml cylinder (96-1070) for CVD/ALD
2EreztechπŸ‡ΊπŸ‡ΈTetrakis(diethylamino) titanium(IV)
3GelestπŸ‡ΊπŸ‡ΈTitanium Tetrakis(Diethylamide), 99+%
4Strem Chemicals, Inc.πŸ‡ΊπŸ‡ΈTetrakis(diethylamino)titanium(IV), 99%
5EpiValenceπŸ‡¬πŸ‡§Titanium diethylamide does not endorse any chemical suppliers. These links are provided for the benefit of our users. If a link goes bad, let us know.

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Plasma Enhanced Atomic Layer Deposition Film Publications

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1Area selective deposition of TiO2 by intercalation of plasma etching cycles in PEALD process: A bottom up approach for the simplification of 3D integration scheme