2021 Year in Review
The publication database currently has 1616 entries.
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202 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
250 Film and Plasma Characteristics
88 Theses
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Recent Database Additions
Tailoring angular selectivity in SiO2 slanted columnar thin films using atomic layer deposition of titanium nitride
Characterization of Molybdenum Oxide Thin Films Grown by Atomic Layer Deposition
Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition
Search 1616 plasma ALD publications by:
Search 1616 plasma ALD publications by:
TDEATi, (Et2N)4Ti, [(C2H5)2N]4Ti, Tetrakis(DiEthylAmido) Titanium, Titanium Diethylamide, CAS# 4419-47-0
Where to buy
| Number | Vendor | Link |
|---|---|---|
| 1 | Ereztech | Tetrakis(diethylamino) titanium(IV) |
| 2 | Gelest | Titanium Tetrakis(Diethylamide), 99+% |
| 3 | Strem Chemicals, Inc. | Tetrakis(diethylamino)titanium(IV), 99%, 22-1050, contained in 50 ml cylinder (96-1070) for CVD/ALD |
| 4 | Strem Chemicals, Inc. | Tetrakis(diethylamino)titanium(IV), 99% |
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Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Area selective deposition of TiO2 by intercalation of plasma etching cycles in PEALD process: A bottom up approach for the simplification of 3D integration scheme |