Last Month's Statistics

Most Viewed Publications
Most Searched Films
Most Searched Precursors
Most Searched Hardware

The publication database currently has 1567 entries.

Search from:

195 Films Compositions

265 Precursors and Plasma Gases

76 Deposition Hardwares

242 Film and Plasma Characteristics

84 Theses

Use Multifactor Search for more complex searches and for searching by other criteria (author, affiliation, analysis, deposition temperature)

ALD Links
Contact Us
Advertising

Recent Database Additions

In vacuo investigations on the nucleation of TaCN by plasma enhanced atomic layer deposition In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films Influence of oxygen source on the ferroelectric properties of ALD grown Hf_1-xZr_xO₂ films

Search 1567 plasma ALD publications by:

195 Films Compositions

265 Precursors and Plasma Gases

76 Deposition Hardwares

242 Film and Plasma Characteristics

TDEATi, (Et₂N)₄Ti, [(C₂H₅)₂N]₄Ti, Tetrakis(DiEthylAmido) Titanium, Titanium Diethylamide, CAS# 4419-47-0

Where to buy

Number	Vendor	Link
1	Ereztech	Tetrakis(diethylamino) titanium(IV)

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Area selective deposition of TiO₂ by intercalation of plasma etching cycles in PEALD process: A bottom up approach for the simplification of 3D integration scheme