Ti(NMe2)3(guan), tris(dimethylamido) (N,N' diisopropyl-2-dimethylamidoguanidinato) titanium, CAS# 0-0-0

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Electrical and optical properties of TiO2 thin films prepared by plasma-enhanced atomic layer deposition


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