bis(methylcyclopentadienyl) cobalt, Co(MeCp)2, CAS# 0-0-0
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
---|---|
1 | Plasma-enhanced atomic layer deposition of Co using Co(MeCp)2 precursor |