Pulsed Transient Current Measurement Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Pulsed Transient Current Measurement returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO2 thin films